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Gas Handling
Vacuum Chambers Gas Handling



From Delivery . . .

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Orbitally welded
300 series SS tubing
Double-walled tubing
Metal face-seal connections
Compression style connections

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to Custom Cabinets . . .

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Flow rates from < 1 sccm to > 100 cfm
1/8" to >2" OD tubing
Semiconductor and Automotive Emissions grade gasses
ASME pressure code ratings

and Mixing and/or Zone Manifolds . . .

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2 to > 15 channels
Gas stick technology
Pneumatic Valves
Manual Valves
All metal component construction
Real-time controls



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Copyright 2004 Innovative Systems Integration, Inc
Last modified: May 21, 2002